The Study of LTPS-TFTs with CF4 plasma pre-treated poly-silicon and N2 plasma post-treated HfO2 Gate Dielectric Layer
碩士 === 國立交通大學 === 電子研究所 === 100 === In recent years, high performance low-temperature polycrystalline-silicon thin-film transistors (LTPS-TFTs) have been attracted much attention due to the increasing applications in active matrix display (AMLCDs). However, the scaling to Moore’s law are limited to...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65163895817711614308 |