Low Actuation Voltage Lateral CMOS MEMS Switch

碩士 === 國立交通大學 === 電子研究所 === 100 === Because CMOS switch has low efficiencies in high frequency system, the application of MEMS switch in high frequency system is the trend in the recent years. CIC offers a new CMOS MEMS technology now, the MEMS structure can be combined with the electronic circu...

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Bibliographic Details
Main Authors: Chang, Ching-Che, 張景喆
Other Authors: Wen, Kuei-an
Format: Others
Language:en_US
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/57897696373615005962