A Study on Novel Vertical Channel Thin-Film Transistors
博士 === 國立交通大學 === 電子物理系所 === 100 === First, we have successfully fabricated and demonstrated the symmetric vertical-channel Ni-salicided polycrystalline silicon thin-film transistors (VSA-TFTs) for the first time. We investigate the device characteristics and effect of Ni-salicidation, NH3 plasma tr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66809683544940947844 |