Simulation of Thermo-Fluid Flows and Distributions of Oxygen Concentration in CZ Crystal Growth
碩士 === 國立交通大學 === 機械工程學系 === 100 === This study outlines the dynamics of CZ crystal growth and oxygen concentration by simulation of commercial software CGSim. The dynamics of CZ crystal growth are illustrated by the influence of the heater and the pull velocity, and the discussions on the oxygen co...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53583864056347052537 |