High Performance Amorphous In-Ga-Zn-O Thin Film Transistor with Si Capping Layer

碩士 === 國立交通大學 === 光電工程學系 === 100 === With a high mobility (>10 cm2/Vs) than conventional amorphous silicon semiconductor and a low operating voltage (< 5 V) and small sub-threshold voltage swing, amorphous In-Ga-Zn-O thin-film transistors (a-IGZO TFTs) draw a lot of attentions. Besides, due to...

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Bibliographic Details
Main Authors: Chen, Liang-Hao, 陳良豪
Other Authors: Zan, Hsiao-Wen
Format: Others
Language:en_US
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/15813482316844577859