Study of Supercritical Fluid Technology on Novel Transparent Amorphous Aluminum Zinc Tin Oxide Thin Film Transistors
碩士 === 國立交通大學 === 顯示科技研究所 === 100 === Quaternary compound semiconductors which had no indium and no gallium were chose as active layer of thin film transistors. In this study, a-AlZnSnO was chose. Due to supercritical fluid simultaneously possess gas-like high diffusivity and liquid-like high densit...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63930296102018721976 |