Study of LTPS TFT Process by Using Semi-Exposure Mask Technology
碩士 === 國立交通大學 === 平面顯示技術碩士學位學程 === 100 === This paper is discussed how to reduce the LTPS TFT process in order to make cost down, reduce the process time and increase the production value. For this purpose, I propose the New(1) and New(2) LTPS TFT process flow, using gray tone mask to merge two PEP...
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| Format: | Others |
| Language: | zh-TW |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51692350326449652170 |