Electron Cyclotron Resonance Plasma Diagnostics by Using Self-fabricated Langmuir Probe
碩士 === 國立中央大學 === 能源工程研究所 === 100 === Due to the state of plasma is the decisive factor to thin film deposition equipment, it is necessary to investigate the formation mechanism of plasma using plasma measurement techniques or get the plasma information such as density and energy distribution of par...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66082182320972122089 |