The study of the quasi-crystal silicon thin film with UV assisted in the porous silicon layer.
碩士 === 國立中央大學 === 機械工程研究所 === 100 === The semiconductor manufacturing technology follows the Moor’s law in the past. The development of the semiconductor industry has entered the nanoscale process, such as the 28 nm and the 22 nm. Silicon on insulator, SOI, which has the material structure can solve...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42615485185832506052 |