Investigation on Ammonia Removal Efficiency Achieved with Wet Scrubbers for an LED Manufacturer
碩士 === 國立中央大學 === 環境工程研究所 === 100 === Due to the rapid change and diversification of products, semiconductor industry has to adopt different processes and material to meet the needs of new products in a faster path nowadays. Ammonia (NH3) gas has been widely used by this industry, especially for man...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23888054851481103418 |