Research of High Efficiency Silicon Heterojunction Solar Cell Fabricated by Sputtering:Impact of Silicon Thin Film Properties on Device Performance
博士 === 國立中央大學 === 光電科學研究所 === 100 === Sputtering is a popular technique with many advantages for thin film deposition. However, as for the preparation of hydrogenated silicon thin film, ion bombardment accompanies during sputtering may generate microstructures (voids, columnar structures) within the...
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| Format: | Others |
| Language: | zh-TW |
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2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58384568194537662124 |