Research on Photo and Magneto-Enhanced Sensitivity of CMOS Gas Sensor
碩士 === 國立彰化師範大學 === 機電工程學系 === 100 === In this research, a new proposed gas sensor with stack electrodes was built with small gap of electrodes mainly by using 2P4M 0.35 μm CMOS MEMS IC technology of TSMC to detect the CO concentration, using photo-catalytic and magnetic-catalysis to enhance the sen...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05034940496013041486 |