Study of Machanical Properties of CrAlN Coatings by Using the Unbalanced Magnetron Sputtering
碩士 === 國立高雄第一科技大學 === 機械與自動化工程研究所 === 100 === In this study, the CrAlN films are deposited on high speed tool steel(SKH51) by the reactive unbalanced magnetron sputtering process . The experimental parameters were fixed to be Bias voltage、N2 flow rate、working distance、the chromium target current、rot...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85100380423425826780 |