The New Fabrication Methods For Semiellipsoid Microlens Array
碩士 === 南開科技大學 === 車輛與機電產業研究所 === 100 === This paper presents two new semi-ellipsoid microlens fabrication methods. one is controlling the printing gap in the UV lithography process without thermal reflow, the other is the method of lift-off and alignment exposure processes. The UV proximity printing...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
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Online Access: | http://ndltd.ncl.edu.tw/handle/83427840604949005329 |