A study of nickel-chromium-titanium thin film and nickel-chromium- titanium - aluminum thin film deposited by co-sputtering

碩士 === 國立屏東科技大學 === 機械工程系所 === 100 === The objective of this experiment is to make a series study of the nickel-chromium-silicon thin film and nickel-chromium-titanium- aluminum thin film, respectively, which are fabricated on the glass by co-sputter. With several different the sputtering power, arg...

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Bibliographic Details
Main Authors: Yung-Lin Huang, 黃勇霖
Other Authors: Lay-Gaik Teoh
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/74829498940093902119