The effects of vacancy cluster on thermal / mechanical properties of silicon crystals and nanowires
碩士 === 國立屏東科技大學 === 機械工程系所 === 100 === In recent decade year, the semiconductor industry has developed rapidly, and the most commonly used semiconductor materials is silicon. However, there may be exist intrinsic defects in materials and the effects of vacancy defects on the mechanical behavior of n...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60423240915971934170 |