Epitaxial Growth of TiO2 Thin Film on NaCl Substrate by Oxidation of TiO Thin Film
博士 === 國立中山大學 === 材料與光電科學學系研究所 === 100 === Ti thin films were deposited by a radio frequency ion-beam sputtering system. Deposition resulted from sputtering a Ti target (99.995%) with an Ar ion beam. Epitaxial TiO thin films with different orientations, which came from oxidizing Ti thin films, wer...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25804486810441937730 |