Development of Flexural Plate-wave Device with Silicon Trench Reflective Grating Structure
碩士 === 國立中山大學 === 電機工程學系研究所 === 100 === Abstract Compared with the other micro acoustic wave devices, the flexural plate-wave (FPW) device is more suitable for being used in liquid-sensing applications due to its higher mass sensitivity, lower phase velocity and lower operation frequency. However, c...
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| Format: | Others |
| Language: | zh-TW |
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2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51830297889596234499 |