An Effective Two Stage Dispatching Rule for Cycle Time Reduction in Photolithography Area with Multi-Workstation

碩士 === 國立清華大學 === 工業工程與工程管理學系 === 100 === In the semiconductor industry, mean cycle time is usually one of the key perfor-mance measures used by fabrication facilities to maintain their competitive advantage. As the machine in the photolithography area is more expensive than that in other areas, pho...

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Bibliographic Details
Main Authors: Yen, Li-Yuan, 顏笠淵
Other Authors: Chang, Kuo-Hao
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/17881712280429658672