The investigation and improvement of abnormal white smoke from the exhaust system in a semiconductor plant
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 100 === Abnormal emission of white smoke in exhaust system is the common problem in semiconductors and TFT-LCD plants. In addition to cause people complaint and petition, abnormal white smoke might cause the opacity rate exceeding to 20 percent which is against the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76206584759281737308 |