The investigation and improvement of abnormal white smoke from the exhaust system in a semiconductor plant

• Main Authors: Chang, Ming-Cheng, 張明正
• Other Authors: 黃雪玲
• Format: Others
• Language: zh-TW
• Published: 2012
• Online Access: http://ndltd.ncl.edu.tw/handle/76206584759281737308

碩士 === 國立清華大學 === 工業工程與工程管理學系 === 100 === Abnormal emission of white smoke in exhaust system is the common problem in semiconductors and TFT-LCD plants. In addition to cause people complaint and petition, abnormal white smoke might cause the opacity rate exceeding to 20 percent which is against the provisions of the “stationary sources of air pollutants emission standards”. White smoke problems bring about government penalties, such as forcing the factory to make improvements within limited time, plant shutdown and fines. Furthermore, it will seriously damage company image. Therefore, all semiconductors and TFT-LCD plants are working hard to solve the problems of white smoke in various technical ways. In this study, a semiconductor plant was taken as a case study to investigate and improve the air pollution control equipment with regard to acid / toxic exhaust system in order to reduce the abnormal white smoke emission problems. In this study, “problem-solving type” of the logical architecture of the QC Story was applied. Step by step with the itemized layer, three main reasons were identified: 1) The Local Scrubber processed in poor efficiency, 2) Outsourcing personnel failed SOP when they maintain the Local Scrubber, and 3) The staffs did not promptly repair when the Local Scrubber went extraordinary. The results of this study revealed that improvements in engineering and management not only effectively reduce white smoke abnormal emission but also reduce operation cost and the occupational hazards such as leakage of acid and waste gas.