UNISON Framework for Dispatching Problem of Photolithography Area in Semiconductor Manufacturing
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 100 === Photolithography machines are the bottleneck of a wafer fab, its dispatching has a significant effect on loading balance of other area. Effectively and efficiently utilize the bottleneck is important to improve tool productivity and maintain the competitive...
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| Format: | Others |
| Language: | zh-TW |
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2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67627006991620429576 |