Study on AlCrNbSiTa Nitride Films Deposited by Reactive DC Sputtering
碩士 === 國立清華大學 === 材料科學工程學系 === 100 === 因申請專利緣故,資料延後公開
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
|
Online Access: | http://ndltd.ncl.edu.tw/handle/21014829724151141726 |