The Characterization and Circuit Model of a Transformer Coupled Plasma Source

碩士 === 國立清華大學 === 物理系 === 100

Bibliographic Details
Main Authors: Lin, Gang-yi, 林剛毅
Other Authors: 寇崇善
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/78356589007084568851