Design and Implementation of a CMOS-MEMS Altimeter
碩士 === 國立清華大學 === 動力機械工程學系 === 100 === This study presents CMOS-MEMS capacitive type altimeter with low pressure application. The sensing range is defined below 101.32kPa for detecting low pressure change (about 100Pa). The altimeter containing a reference pressure chamber coated around with parylen...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/07835461561881100547 |