Growth of ZrO2 by Heat Treating ZrN Thin Film under Controlled Atmosphere
碩士 === 國立清華大學 === 工程與系統科學系 === 100 === The purpose of this study is to solve the wettability issue by growing ZrO2 from heat treatment of the ZrN thin films on stainless steel substrate and investigate the oxidation mechanism of ZrN films in different atmospheres. ZrN thin films were deposited on Si...
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| Format: | Others |
| Language: | en_US |
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2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71502771900010383035 |