A Study of ZnO and ZnO:Ga Thin-Film Electroluminescent Devices
碩士 === 國立臺灣海洋大學 === 電機工程學系 === 100 === In this study, RF Magnetron Sputtering method was used to deposit ZnO and ZnO:Ga thin film on SiO2/Si(P+)substrate. Under N2 atmosphere, thin film treated with different annealing temperatures will be performed with characteristic measurement and analysis using...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21255117088314051489 |