Optical properties of ZnO/MgO multilayer films grown by sputtering

碩士 === 國立臺灣海洋大學 === 電機工程學系 === 100 === We have deposited the ZnO/MgO multilayer films designed for Bragg reflector by sputtering technique. The 10 and 15 pairs of ZnO/MgO multilayer films with designed thickness of each single ZnO and MgO layer are deposited on silicon substrate. X-ray diffraction (...

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Bibliographic Details
Main Authors: Zih-Kuan Wen, 溫子寬
Other Authors: Kwong-Kau Tiong
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/07642941917573674743