Micromachined Microwave Filter and Biomedical Drug Delivery Box Using CMOS-Compatible ICP Deep Trench Technology
博士 === 國立臺灣大學 === 電子工程學研究所 === 100 ===
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/20135469195530180040 |