Micromachined Microwave Filter and Biomedical Drug Delivery Box Using CMOS-Compatible ICP Deep Trench Technology

Micromachined Microwave Filter and Biomedical Drug Delivery Box Using CMOS-Compatible ICP Deep Trench Technology

博士 === 國立臺灣大學 === 電子工程學研究所 === 100 ===

Bibliographic Details
Main Authors: Pen-Li Huang, 黃本立
Other Authors: 呂學士
Format: Others
Language:en_US
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/20135469195530180040
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spelling ndltd-TW-100NTU054280392016-04-04T04:17:30Z http://ndltd.ncl.edu.tw/handle/20135469195530180040 Micromachined Microwave Filter and Biomedical Drug Delivery Box Using CMOS-Compatible ICP Deep Trench Technology 應用電感耦合型電漿蝕刻且與CMOS製程相容之微機電微波濾波器及生醫遞送藥箱 Pen-Li Huang 黃本立 博士 國立臺灣大學 電子工程學研究所 100 呂學士 2011 學位論文 ; thesis 113 en_US
collection NDLTD
language en_US
format Others
sources NDLTD
description 博士 === 國立臺灣大學 === 電子工程學研究所 === 100 ===
author2 呂學士
author_facet 呂學士
Pen-Li Huang
黃本立
author Pen-Li Huang
黃本立
spellingShingle Pen-Li Huang
黃本立
Micromachined Microwave Filter and Biomedical Drug Delivery Box Using CMOS-Compatible ICP Deep Trench Technology
author_sort Pen-Li Huang
title Micromachined Microwave Filter and Biomedical Drug Delivery Box Using CMOS-Compatible ICP Deep Trench Technology
title_short Micromachined Microwave Filter and Biomedical Drug Delivery Box Using CMOS-Compatible ICP Deep Trench Technology
title_full Micromachined Microwave Filter and Biomedical Drug Delivery Box Using CMOS-Compatible ICP Deep Trench Technology
title_fullStr Micromachined Microwave Filter and Biomedical Drug Delivery Box Using CMOS-Compatible ICP Deep Trench Technology
title_full_unstemmed Micromachined Microwave Filter and Biomedical Drug Delivery Box Using CMOS-Compatible ICP Deep Trench Technology
title_sort micromachined microwave filter and biomedical drug delivery box using cmos-compatible icp deep trench technology
publishDate 2011
url http://ndltd.ncl.edu.tw/handle/20135469195530180040
work_keys_str_mv AT penlihuang micromachinedmicrowavefilterandbiomedicaldrugdeliveryboxusingcmoscompatibleicpdeeptrenchtechnology
AT huángběnlì micromachinedmicrowavefilterandbiomedicaldrugdeliveryboxusingcmoscompatibleicpdeeptrenchtechnology
AT penlihuang yīngyòngdiàngǎnǒuhéxíngdiànjiāngshíkèqiěyǔcmoszhìchéngxiāngróngzhīwēijīdiànwēibōlǜbōqìjíshēngyīdìsòngyàoxiāng
AT huángběnlì yīngyòngdiàngǎnǒuhéxíngdiànjiāngshíkèqiěyǔcmoszhìchéngxiāngróngzhīwēijīdiànwēibōlǜbōqìjíshēngyīdìsòngyàoxiāng
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