Sealing Performance Analysis for FOUP
碩士 === 國立臺灣大學 === 機械工程學研究所 === 100 === Systematic procedures are developed to investigate sealing characteristics of an elastomeric gasket of the front-opening unified pod (FOUP) used for the wafer storage in the current study. The gasket will be squeezed against a pod when a latch mechanism is oper...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13610937834770665582 |