Fabrication of a tactile Scanning Probe for Micro/Nano CMM

碩士 === 國立臺灣大學 === 機械工程學研究所 === 100 === In this research, a high precision tactile 3D probe is proposed. Based on suspension mechanism with a stylus, the probe is able to detect the 3D displacement on the ball tip using optical sensors. Calibrations with a nano measuring and positioning machine prove...

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Bibliographic Details
Main Authors: Chao-Min Huang, 黃兆民
Other Authors: 范光照
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/81646935564643397257