The Etching Holes Effects on Capacitive Micro-Devices
碩士 === 國立臺灣大學 === 應用力學研究所 === 100 === In many MEMS devices, movable suspension structure is the most important design to achieve sensing or actuating function. Etching the sacrificial layer under the microstructure is a common method to release structure. For the device which has large area, it is n...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23572789268871368086 |