Fabrication of thick metallic microstructures using microfluidic technique and Tollens’ reaction for microfluidic components

博士 === 國立臺灣大學 === 應用力學研究所 === 100 === A simple micromachined process based on one photomask is developed for a novel micropreconcentrator (μPCT) used in a micro gas chromatograph (μGC). Unique thick silver heating microstructures with a high surface area for microheaters of μPCT are fabricated by c...

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Bibliographic Details
Main Authors: Tzu-Heng Wu, 吳咨亨
Other Authors: Horn-Jiunn Sheen
Format: Others
Language:en_US
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/58251137220782068480