Study of roll-to-roll sputted ITO thin films annealed by CO2 laser
碩士 === 國立臺灣科技大學 === 機械工程系 === 100 === This thesis presents the optical and electrical properties of annealed ITO film on polyethylene terephthalate (PET) substrate prepared under different laser power and speed by CO2. The indium tin oxide (ITO) thin film deposited on a PET substrate is using roll-t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
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Online Access: | http://ndltd.ncl.edu.tw/handle/54775402918899474160 |