Study of roll-to-roll sputted ITO thin films annealed by CO2 laser

碩士 === 國立臺灣科技大學 === 機械工程系 === 100 === This thesis presents the optical and electrical properties of annealed ITO film on polyethylene terephthalate (PET) substrate prepared under different laser power and speed by CO2. The indium tin oxide (ITO) thin film deposited on a PET substrate is using roll-t...

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Bibliographic Details
Main Authors: Peng-cih Huang, 黃鵬慈
Other Authors: Ching-Kong Chao
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/54775402918899474160