The Simulation of Micro Probe Array Mold by Using The Microlens Mask Through Proximity Printing
碩士 === 國立臺灣科技大學 === 機械工程系 === 100 === In this study, an mold of micro-probe array was fabricated by a 3D-mask with proximity exposure. By the limit of thermal reflow, five kinds of microlenses were defined. The ranking of radius of curvature (RC) of microlens: Lens C > Lens E > Lens D > Len...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/44571937605650063067 |