Simulation and experimental study of fast hot embossing process

碩士 === 國立臺灣科技大學 === 機械工程系 === 100 === Micro/nano imprint technology is a commonly expected technique nowadays. It is very promising in the future because the technology has several advantages, such as having nano-scale resolution, forming three dimension structures and high throughput. This techno...

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Bibliographic Details
Main Authors: Lin Yun Wei, 林耘緯
Other Authors: Fuh-Yu Chang
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/48392861896709022029