Characterization of the Modified Sputtering Gun Applied on Thin Film Deposition
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 100 === This thesis focuses on the improvement of a home-made sputtering gun used within the sputtering machine. Here the configuration of modified items had divided into three parts. The first is to design a good heat transfer of the waterway within the back coppe...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/cr5u46 |