Optical Profilometer Based on the Techniques of Common-Path Heterodyne Interferometey and Surface Plasmon Resonance
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 100 === The proposed profilometer with a ten nanometer vertical resolution is based on common-path heterodyne interferometry and the surface plasmon resonance (SPR) angular sensor . The measurement range is proportional to the inverse of the numerical aperture valu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/s9dvtt |