Study on Mechanical Properties of Organic/inorganic Multilayered Barrier Structures Deposited on Flexible Plastic Substrates
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 100 === In this study, an organosilicon/silicon oxide (SiOx) thin film prepared using plasma-enhanced chemical vapor deposition (PECVD) using tetramethylsilane (TMS) monomer and TMS-oxygen gas mixture was consecutively deposited onto the flexible plastic substrate...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/au3k8b |