Preparation of High Efficiency PhotoCatalytic-PECVD TiO2 Thin Film
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 100 === In this study, Plasma-enhanced chemical vapor system (PECVD) along with using argon gas (Ar) heated TTIP vapor as the carrier gas transmission, coupled to the oxygen RF plasma excitation gas was used to prepare the thin film of Titanium dioxide (TiO2). TTIP...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9zhum5 |