Fabrication of OADM Devices Based on Soft Lithography
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 100 === In this study, the optical waveguide elements of the MEMS process technology, combined with the turning model of holographic interference lithography and soft mold technology, to make OADM components. First experiment, the MEMS technology to produce optical...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/t2q9w7 |