A Hybrid Electrochemical Micro-Machining Method of Tungsten Microprobe

碩士 === 國立虎尾科技大學 === 機械與機電工程研究所 === 100 === Microprobes are a component which can be used to measure the features of objects. It was applied to manufacturing widely. For example, it can be used to measure surface roughness, electricity, integrated circuit yield and so on. There are different kinds of...

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Bibliographic Details
Main Authors: Yu-Cheng Lin, 林育成
Other Authors: Jeng-Haur Horng
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/e3w3c2