Fabrication of TiO2 nanopillar - arrays on flexible substrates
碩士 === 南台科技大學 === 光電工程系 === 100 === In this study, titanium dioxide (TiO2) were grown on anodic aluminum oxide ( AAO ) templates by atomic layer deposition (ALD) at 300 °C with TiCl4 and H2O reactants. Because glass substrate is weight and breakable, we used polymer substrate which is flexible, ligh...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41892612515159821347 |