Fault detection Using Independent Component Analysis in Semiconductor Processes
碩士 === 國立臺北科技大學 === 工業工程與管理系碩士班 === 100 === Nowadays, semiconductor industry has been marching toward an increasingly automated, ubiquitous data gathering production system that is full of manufacturing complexity and environment uncertainty. Therefore developing an effective fault detection syste...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/x2886x |