The tribological performance of TiCrN films deposite by closed field magnetron DC sputtering
碩士 === 國立臺北科技大學 === 車輛工程系所 === 100 === In this study, TiCrN coatings were deposited on SUJ-2 substrate surface from titanium and chromium targets using the closed field magnetron sputtering system. These TiCrN coatings were prepared at various power of titanium and chromium targets. The microstructu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3dfmys |