The tribological performance of TiCrN films deposite by closed field magnetron DC sputtering
碩士 === 國立臺北科技大學 === 車輛工程系所 === 100 === In this study, TiCrN coatings were deposited on SUJ-2 substrate surface from titanium and chromium targets using the closed field magnetron sputtering system. These TiCrN coatings were prepared at various power of titanium and chromium targets. The microstructu...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
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Online Access: | http://ndltd.ncl.edu.tw/handle/3dfmys |