Cell counting systems with integrated CMOS-MEMS chip and micro-fluidic plastic substrate

碩士 === 國立臺北科技大學 === 機電整合研究所 === 100 === This study mainly used CMOS-MEMS process technology and Micro-Electro-Mechanical Systems (MEMS) technology to produce particle counters. This study divided into three parts, namely (1) CMOS-MEMS counting chip: CMOS-MEMS counting chips were manufactured by TSMC...

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Bibliographic Details
Main Authors: Tien-Chia Chang, 張恬嘉
Other Authors: Jung-Tang Huang
Format: Others
Language:zh-TW
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/q4c2sb