Depositing the Carbon Nanoflakes by RF Magnetron Sputtering for Electron Field Emission Application
碩士 === 大同大學 === 光電工程研究所 === 100 === In this study, we fabricated the carbon nanoflakes (CNFs) on silicon substrate by radio-frequency magnetron sputtering system. Lots of CNFs with thickness of less than 50 nm interlaced together to form a layer of carbon nest-like film with their sharp edges perpen...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90414140796769446191 |