Effect of Post-treatment on the Surface Properites and Blood Compatibility of Diamond-like Carbon Films
碩士 === 大同大學 === 材料工程學系(所) === 100 === Diamond-like carbon films were prepared on silicon substrates using radio frequency plasma enhanced chemical vapor deposition. The different post-treatment time from hydrogen plasma and argon plasma were investigated. The film thickness, surface roughness, film...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2012
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Online Access: | http://ndltd.ncl.edu.tw/handle/80077894545461822885 |