Process Development of Transparent Conducting Oxide Films for Si-Based Solar Cells
碩士 === 國立雲林科技大學 === 電子與光電工程研究所碩士班 === 100 === In this article, The transparent conductive oxide (TCO) of ITO and ITIO. These transparent conductive films were prepared by in-line magnetron sputter deposition method at different substrate temperature and RF power, and application in heterojunction si...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39015211866839761379 |